MEMS education: design, fabrication, and characterization
نویسندگان
چکیده
For more than two decades, intensive worldwide MEMS research and development have led to widespread applications of MEMS-based devices in consumer, industrial, and military products. Harnessing of MEMS technology enabled the birth of pressure sensors, accelerometers, gyroscopes, print heads, optical switches for rapid communications and, recently, the bio-chips for life science applications. Successful design of a MEMS device requires a high level of fabrication knowledge and a dedicated research effort to find a suitable process sequence for fabricating it and, therefore, demands the personnel with specialized training in leading edge MEMS technologies. The MEMS educational program at WPI provides our undergraduate and graduate students in design and manufacturing engineering with critical high-level skills and knowledge in MEMS technology. The MEMS course curriculum has been developed to build up expertise in MEMS design, analysis, fabrication, and characterization. It also emphasizes hands-on student access to equipment for laboratory experiments and demonstrations, with support of a newly-built cleanroom facilities for silicon-based materials and photolithography, including characterization tools such as SEM, AFM, profilometer, optoelectronic holography (OEH), and optical microscopy. This paper describes MEMS multidisciplinary education at WPI and illustrates it with representative examples.
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